Workfunction tuning of zinc oxide films by argon sputtering and oxygen plasma: an experimental and computational study

Title
Workfunction tuning of zinc oxide films by argon sputtering and oxygen plasma: an experimental and computational study
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 6, Pages 065301
Publisher
IOP Publishing
Online
2012-01-28
DOI
10.1088/0022-3727/45/6/065301

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