Local interdiffusion at buried TiN/Si interfaces with scanning probes

Title
Local interdiffusion at buried TiN/Si interfaces with scanning probes
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 21, Pages 215307
Publisher
IOP Publishing
Online
2012-05-10
DOI
10.1088/0022-3727/45/21/215307

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