Study of dc micro-discharge arrays made in silicon using CMOS compatible technology

Published 2012 View Full Article

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Title
Study of dc micro-discharge arrays made in silicon using CMOS compatible technology
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 28, Pages 285202
Publisher
IOP Publishing
Online
2012-06-28
DOI
10.1088/0022-3727/45/28/285202

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