Mass spectrometric study of discharges produced by a large-area dual-frequency–dual-antenna inductively coupled plasma source

Published 2012 View Full Article

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Title
Mass spectrometric study of discharges produced by a large-area dual-frequency–dual-antenna inductively coupled plasma source
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 47, Pages 475201
Publisher
IOP Publishing
Online
2012-10-30
DOI
10.1088/0022-3727/45/47/475201

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