He plasma pretreatment effects on oxygen plasma-induced carbon loss and surface roughening in an ultralow-korganosilicate glass film

Published 2011 View Full Article

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Title
He plasma pretreatment effects on oxygen plasma-induced carbon loss and surface roughening in an ultralow-korganosilicate glass film
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 15, Pages 155204
Publisher
IOP Publishing
Online
2011-04-02
DOI
10.1088/0022-3727/44/15/155204

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