Nanofabrication of III–V semiconductors employing diblock copolymer lithography

Published 2010 View Full Article

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Title
Nanofabrication of III–V semiconductors employing diblock copolymer lithography
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 18, Pages 183001
Publisher
IOP Publishing
Online
2010-04-22
DOI
10.1088/0022-3727/43/18/183001

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