Synergistic damage effects of vacuum ultraviolet photons and O2in SiCOH ultra-low-kdielectric films

Published 2010 View Full Article

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Title
Synergistic damage effects of vacuum ultraviolet photons and O2in SiCOH ultra-low-kdielectric films
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 42, Pages 425201
Publisher
IOP Publishing
Online
2010-10-06
DOI
10.1088/0022-3727/43/42/425201

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