Charging and the secondary electron–electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching

Published 2010 View Full Article

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Title
Charging and the secondary electron–electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 7, Pages 075203
Publisher
IOP Publishing
Online
2010-02-05
DOI
10.1088/0022-3727/43/7/075203

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