Effect of nitrogen doping on TiOxNythin film formation at reactive high-power pulsed magnetron sputtering

Published 2010 View Full Article

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Title
Effect of nitrogen doping on TiOxNythin film formation at reactive high-power pulsed magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 28, Pages 285203
Publisher
IOP Publishing
Online
2010-06-30
DOI
10.1088/0022-3727/43/28/285203

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