Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate

Published 2010 View Full Article

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Title
Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 2, Pages 025202
Publisher
IOP Publishing
Online
2010-12-17
DOI
10.1088/0022-3727/44/2/025202

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