Deposition and characterization of titania–silica optical multilayers by asymmetric bipolar pulsed dc sputtering of oxide targets

Published 2010 View Full Article

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Title
Deposition and characterization of titania–silica optical multilayers by asymmetric bipolar pulsed dc sputtering of oxide targets
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 4, Pages 045302
Publisher
IOP Publishing
Online
2010-01-13
DOI
10.1088/0022-3727/43/4/045302

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