Laser generation of nano-bumps below 2 nm height on silicon for debris-free marking/patterning

Published 2010 View Full Article

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Title
Laser generation of nano-bumps below 2 nm height on silicon for debris-free marking/patterning
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 11, Pages 115302
Publisher
IOP Publishing
Online
2010-03-05
DOI
10.1088/0022-3727/43/11/115302

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