4.6 Article

Experimental study of surface contributions to molecule formation in a recombining N2/O2 plasma

Journal

JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 11, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/43/11/115204

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A low pressure recombining Ar plasma to which mixtures of N-2 and O-2 were added has been studied to explore the relevance of surface related processes for the total chemistry. The abundances of the stable molecules N-2, O-2, NO, N2O and NO2 have been measured by means of a combination of infrared tunable diode laser absorption spectroscopy and mass spectrometry. A gas phase chemical kinetics model was developed in CHEMKIN to investigate the contribution of homogeneous interactions to the conversion of the feedstock gases N-2 and O-2. At a partial pressure of N-2 plus O-2 less than 8 Pa, significant discrepancies between measured and calculated concentrations of N2O and NO2 were observed, indicating that heterogeneous processes are dominating the chemistry in this pressure range. At a partial pressure of N-2 plus O-2 higher than 40 Pa and a relatively high fraction of admixed O-2 we observed a fair agreement between measured and calculated concentrations of NO molecules, indicating that homogeneous processes (notably N atom induced) are more dominant than heterogeneous processes.

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