Energetic deposition of metal ions: observation of self-sputtering and limited sticking for off-normal angles of incidence

Title
Energetic deposition of metal ions: observation of self-sputtering and limited sticking for off-normal angles of incidence
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 6, Pages 065206
Publisher
IOP Publishing
Online
2010-01-30
DOI
10.1088/0022-3727/43/6/065206

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