The morphology and structure of PVD ZrN–Cu thin films

Published 2009 View Full Article

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Title
The morphology and structure of PVD ZrN–Cu thin films
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 8, Pages 085308
Publisher
IOP Publishing
Online
2009-04-02
DOI
10.1088/0022-3727/42/8/085308
References
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