Energy flux measurements in high power impulse magnetron sputtering

Published 2009 View Full Article

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Title
Energy flux measurements in high power impulse magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 18, Pages 185202
Publisher
IOP Publishing
Online
2009-08-25
DOI
10.1088/0022-3727/42/18/185202
References
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