Hydrodynamic and kinetic modelling of complex radio-frequency plasmas

Title
Hydrodynamic and kinetic modelling of complex radio-frequency plasmas
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 19, Pages 194015
Publisher
IOP Publishing
Online
2009-09-19
DOI
10.1088/0022-3727/42/19/194015

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