Ion beam induced anisotropic deformation of Si nanosprings

Published 2009 View Full Article

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Title
Ion beam induced anisotropic deformation of Si nanosprings
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 14, Pages 145404
Publisher
IOP Publishing
Online
2009-06-27
DOI
10.1088/0022-3727/42/14/145404
References
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