Optical quality SiC nano-structures by spin-on technique and anneal on Si

Published 2009 View Full Article

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Title
Optical quality SiC nano-structures by spin-on technique and anneal on Si
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 23, Pages 234002
Publisher
IOP Publishing
Online
2009-11-17
DOI
10.1088/0022-3727/42/23/234002

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