Gas temperature, electron density and electron temperature measurement in a microwave excited microplasma

Published 2008 View Full Article

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Title
Gas temperature, electron density and electron temperature measurement in a microwave excited microplasma
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 10, Pages 105212
Publisher
IOP Publishing
Online
2008-05-04
DOI
10.1088/0022-3727/41/10/105212

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