Refinement of Monte Carlo simulations of electron–specimen interaction in low-voltage SEM

Published 2008 View Full Article

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Title
Refinement of Monte Carlo simulations of electron–specimen interaction in low-voltage SEM
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 21, Pages 215310
Publisher
IOP Publishing
Online
2008-10-17
DOI
10.1088/0022-3727/41/21/215310

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