Formation of TiOx films produced by high-power pulsed magnetron sputtering

Published 2008 View Full Article

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Title
Formation of TiOx films produced by high-power pulsed magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 5, Pages 055202
Publisher
IOP Publishing
Online
2008-02-15
DOI
10.1088/0022-3727/41/5/055202

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