Fast (tens to hundreds of eV) neutral beams for materials processing

Published 2008 View Full Article

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Title
Fast (tens to hundreds of eV) neutral beams for materials processing
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 2, Pages 024001
Publisher
IOP Publishing
Online
2008-01-05
DOI
10.1088/0022-3727/41/2/024001
References
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