Investigation of interface properties of sputter deposited TiN/CrN superlattices by low angle x-ray reflectivity

Published 2008 View Full Article

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Title
Investigation of interface properties of sputter deposited TiN/CrN superlattices by low angle x-ray reflectivity
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 20, Pages 205409
Publisher
IOP Publishing
Online
2008-10-01
DOI
10.1088/0022-3727/41/20/205409
References
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