Charge trapping effect at the contact between a high-work-function metal and Ta2O5 high-k dielectric

Published 2008 View Full Article

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Title
Charge trapping effect at the contact between a high-work-function metal and Ta2O5 high-k dielectric
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 10, Pages 105302
Publisher
IOP Publishing
Online
2008-04-23
DOI
10.1088/0022-3727/41/10/105302

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