Line-type inductively coupled plasma source with ferromagnetic module

Published 2008 View Full Article

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Title
Line-type inductively coupled plasma source with ferromagnetic module
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 1, Pages 015204
Publisher
IOP Publishing
Online
2008-12-11
DOI
10.1088/0022-3727/42/1/015204

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