Atomic Layer Deposition of Aluminum and Titanium Phosphates

Published 2012 View Full Article

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Title
Atomic Layer Deposition of Aluminum and Titanium Phosphates
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 116, Issue 9, Pages 5920-5925
Publisher
American Chemical Society (ACS)
Online
2012-02-23
DOI
10.1021/jp205222g

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