Hyperthermal Oxygen Interacting with Silicon Surfaces: Adsorption, Implantation, and Damage Creation

Published 2011 View Full Article

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Title
Hyperthermal Oxygen Interacting with Silicon Surfaces: Adsorption, Implantation, and Damage Creation
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 115, Issue 11, Pages 4818-4823
Publisher
American Chemical Society (ACS)
Online
2011-03-02
DOI
10.1021/jp112068z

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