Can We Control the Thickness of Ultrathin Silica Layers by Hyperthermal Silicon Oxidation at Room Temperature?

Published 2011 View Full Article

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Title
Can We Control the Thickness of Ultrathin Silica Layers by Hyperthermal Silicon Oxidation at Room Temperature?
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 115, Issue 50, Pages 24839-24848
Publisher
American Chemical Society (ACS)
Online
2011-11-16
DOI
10.1021/jp2082566

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