Comparative Study of Titanium Dioxide Atomic Layer Deposition on Silicon Dioxide and Hydrogen-Terminated Silicon

Published 2010 View Full Article

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Title
Comparative Study of Titanium Dioxide Atomic Layer Deposition on Silicon Dioxide and Hydrogen-Terminated Silicon
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 114, Issue 23, Pages 10498-10504
Publisher
American Chemical Society (ACS)
Online
2010-05-22
DOI
10.1021/jp1013303

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