Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4

Published 2009 View Full Article

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Title
Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 113, Issue 37, Pages 16307-16310
Publisher
American Chemical Society (ACS)
Online
2009-08-21
DOI
10.1021/jp907266c

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