Fabrication of Ion-Implanted Si Nanowire p-FETs

Published 2008 View Full Article

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Title
Fabrication of Ion-Implanted Si Nanowire p-FETs
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 112, Issue 34, Pages 13287-13291
Publisher
American Chemical Society (ACS)
Online
2008-08-05
DOI
10.1021/jp804059g

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