Atomic Layer Deposition and Characterization of Bi2Te3 Thin Films

Published 2014 View Full Article

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Title
Atomic Layer Deposition and Characterization of Bi2Te3 Thin Films
Authors
Keywords
-
Journal
JOURNAL OF PHYSICAL CHEMISTRY A
Volume 119, Issue 11, Pages 2298-2306
Publisher
American Chemical Society (ACS)
Online
2014-08-09
DOI
10.1021/jp5063429

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