Extreme Ultraviolet (EUV)-Resist Materials of Noria (Water Wheel-Like Cyclic Oligomer) Derivatives containing Acetal Moieties

Published 2010 View Full Article

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Title
Extreme Ultraviolet (EUV)-Resist Materials of Noria (Water Wheel-Like Cyclic Oligomer) Derivatives containing Acetal Moieties
Authors
Keywords
-
Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 23, Issue 5, Pages 657-664
Publisher
Technical Association of Photopolymers, Japan
Online
2010-09-21
DOI
10.2494/photopolymer.23.657

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