Simulation Study on Bubble Trapping in UV Nanoimprint Lithography

Published 2009 View Full Article

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Title
Simulation Study on Bubble Trapping in UV Nanoimprint Lithography
Authors
Keywords
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Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 22, Issue 2, Pages 171-174
Publisher
Technical Association of Photopolymers, Japan
Online
2009-08-07
DOI
10.2494/photopolymer.22.171

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