Hydrophobic Surface Construction by Phase-Separation of Fluorinated Block Copolymer for Immersion Lithography

Published 2008 View Full Article

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Title
Hydrophobic Surface Construction by Phase-Separation of Fluorinated Block Copolymer for Immersion Lithography
Authors
Keywords
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Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 21, Issue 5, Pages 679-684
Publisher
Technical Association of Photopolymers, Japan
Online
2008-09-01
DOI
10.2494/photopolymer.21.679

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