Influence of hydrogen content and network connectivity on the coefficient of thermal expansion and thermal stability for a-SiC:H thin films

Published 2014 View Full Article

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Title
Influence of hydrogen content and network connectivity on the coefficient of thermal expansion and thermal stability for a-SiC:H thin films
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 389, Issue -, Pages 78-85
Publisher
Elsevier BV
Online
2014-03-17
DOI
10.1016/j.jnoncrysol.2014.02.007

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