Effects of high-temperature annealing on electron spin resonance in SiOx films prepared by R. F. sputtering system

Published 2010 View Full Article

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Title
Effects of high-temperature annealing on electron spin resonance in SiOx films prepared by R. F. sputtering system
Authors
Keywords
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Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 357, Issue 3, Pages 981-985
Publisher
Elsevier BV
Online
2010-12-25
DOI
10.1016/j.jnoncrysol.2010.10.045

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