Plasma etching of As2S3 films for optical waveguides

Published 2008 View Full Article

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Title
Plasma etching of As2S3 films for optical waveguides
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 354, Issue 27, Pages 3179-3183
Publisher
Elsevier BV
Online
2008-03-11
DOI
10.1016/j.jnoncrysol.2008.01.014

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