Effect of UV anneal on plasma CVD low-k film

Published 2008 View Full Article

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Title
Effect of UV anneal on plasma CVD low-k film
Authors
Keywords
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Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 354, Issue 26, Pages 2973-2982
Publisher
Elsevier BV
Online
2008-02-15
DOI
10.1016/j.jnoncrysol.2007.12.011

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