Incipient amorphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperature

Published 2007 View Full Article

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Title
Incipient amorphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperature
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 354, Issue 2-9, Pages 399-403
Publisher
Elsevier BV
Online
2007-11-15
DOI
10.1016/j.jnoncrysol.2007.07.050

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