Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor

Title
Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor
Authors
Keywords
-
Journal
Publisher
Wiley-Blackwell
Online
2015-07-29
DOI
10.1002/pssa.201532276

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