NF3 decomposition over Al2O3 reagents without water

Published 2011 View Full Article

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Title
NF3 decomposition over Al2O3 reagents without water
Authors
Keywords
-
Journal
Journal of Natural Gas Chemistry
Volume 20, Issue 4, Pages 418-422
Publisher
Elsevier BV
Online
2011-08-30
DOI
10.1016/s1003-9953(10)60201-0

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