Microstructural Characteristics of Tin Oxide-Based Thin Films on (0001) Al2O3 Substrates: Effects of Substrate Temperature and RF Power During Co-Sputtering

Title
Microstructural Characteristics of Tin Oxide-Based Thin Films on (0001) Al2O3 Substrates: Effects of Substrate Temperature and RF Power During Co-Sputtering
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 14, Issue 12, Pages 8908-8914
Publisher
American Scientific Publishers
Online
2014-09-25
DOI
10.1166/jnn.2014.10055

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