Initial Reaction of Dimethylaluminum Isopropoxide with Hydrogen-Terminated Si (001) Surface Using Density Functional Theory

Title
Initial Reaction of Dimethylaluminum Isopropoxide with Hydrogen-Terminated Si (001) Surface Using Density Functional Theory
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 13, Issue 5, Pages 3564-3567
Publisher
American Scientific Publishers
Online
2013-04-11
DOI
10.1166/jnn.2013.7300

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