Study on the Micro-Heater Geometry in In2O3 Micro Electro Mechanical Systems Gas Sensor Platforms and Effects on NO2 Gas Detecting Performances

Published 2012 View Full Article

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Title
Study on the Micro-Heater Geometry in In2O3 Micro Electro Mechanical Systems Gas Sensor Platforms and Effects on NO2 Gas Detecting Performances
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 12, Issue 2, Pages 1170-1173
Publisher
American Scientific Publishers
Online
2012-04-16
DOI
10.1166/jnn.2012.4619

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