Antireflective Hydrophobic Si Subwavelength Structures Using Thermally Dewetted Ni/SiO2 Nanomask Patterns

Title
Antireflective Hydrophobic Si Subwavelength Structures Using Thermally Dewetted Ni/SiO2 Nanomask Patterns
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 11, Issue 11, Pages 10130-10135
Publisher
American Scientific Publishers
Online
2012-01-25
DOI
10.1166/jnn.2011.5000

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