Interaction of TEMAHf Precursor with OH-Terminated Si (001) Surface: A First Principles Study

Title
Interaction of TEMAHf Precursor with OH-Terminated Si (001) Surface: A First Principles Study
Authors
Keywords
-
Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 11, Issue 5, Pages 4324-4327
Publisher
American Scientific Publishers
Online
2011-04-18
DOI
10.1166/jnn.2011.3623

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