Metal Patterning Process on Rigid and Flexible Substrates Using Nanoimprint Lithography and Resist Pattern Transfer Technique

Published 2009 View Full Article

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Title
Metal Patterning Process on Rigid and Flexible Substrates Using Nanoimprint Lithography and Resist Pattern Transfer Technique
Authors
Keywords
-
Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 9, Issue 7, Pages 4338-4341
Publisher
American Scientific Publishers
Online
2009-05-14
DOI
10.1166/jnn.2009.m56

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