Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

Published 2009 View Full Article

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Title
Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives
Authors
Keywords
-
Journal
JOURNAL OF NANOPARTICLE RESEARCH
Volume 11, Issue 7, Pages 1521-1554
Publisher
Springer Nature
Online
2009-06-11
DOI
10.1007/s11051-009-9662-6

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